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In-line Batch ALD Equipment

CHINT

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Zhejiang CHINT Electrics Co., Ltd.

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Manufacturing Company

ALD coating method improves the efficiency of silicon cell effectively;
High technical adaptability, with just two extra steps to conventional cell manufacturing process;
The cost of ALD coating is lower than conventional PECVD coating;
In-line flat-sheet equipment ensures reliable operation, significantly reducing the stuck
and fragmented phenomenon during production;
Suitable for mass production, the first ALD equipment for mass production in China.

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